Based on technology and supported by service
With the historical mission of bring bricks and tiles for the ‘China wisely made’. We would abide by the spirit of scientific research and the needs of our country as well as the people.
With the positive attitude of forging ahead and pioneering, we strive to leave a chapter of Z & H in the history of semiconductor equipment in the intelligent manufacturing industry.
The localized equipment for major equipment before and after lithography [gluing and developing].
TEL TRACK
![](https://www.zh-et.cn/wp-content/uploads/2022/01/teck.png)
- Refurbishing & Remanufacture
- Technical Service
- Installation & Set-up
- Calibration or Re-calibration
- Parts Replacement
- Coat & Dev Modify and Upgrade
- Wafer Size Conversion
- M/A, CS Arm Overhaul
- WEE Lamphouse OH
- CP, HP Overhaul
- Heater Exchange OH
- T&H, Monitor OH
Repair & Maintenance for parts
Repair / Remanufacturing
Main Arm ,C/S Arm ,WEE ,THERMO-CON ,Temp CTL , ACU, DC Power, T&H , Spin Motor & Driver , CP Unity etc.
Repair & Maintenance for parts
8-inch
Robot Overhaul
- Application System : TEL Unity2e
- Maker : Yaskawa Electric
- Controller Model : SRC- Ⅰ or SRC-Ⅱ
- Robot Type : VS2A or VS2B/VS2C/VS2E
- Pre-Aligner Type : V0SJ, V0SH
Stable Transfer → Increase Up-time
![](https://www.zh-et.cn/wp-content/uploads/2021/12/accc1.png)
Gap ass’y Overhaul
- Application : SCCM, DRM, IEM, PE chamber
- Chain change
- Bearing Change
- Balance Calibration
![](https://www.zh-et.cn/wp-content/uploads/2021/12/accc2.png)
Transformation and Upgrading
Vacuum Arm
Mechanical arms
- Main arm modify to vacuum arm, centering accurate transmit.
- ETCInclude Tel Scurrber tool main arm modify.
PDP to LCD
Operation panel
- PDP is easilybroken.
- Improve clarity, operation more convenient for user.
External Sensor
BUFFER TANK
- The internal sensor of chemical buffer tank ageing frequently and scrapping occurs.
- The external sensor of buffer tank does not need to contact the chemicals, which avoids corrosion and causes the machine not to be scrapped.
- The chemical level (LL, L, H, HH) of buffer tank is easy to adjust and saves time.
Transformation and Upgrading
12-inch
![](/wp-content/uploads/2022/01/pp4.png)
LLM MOTOR
- Application System :TEL Telius
- Maker : Nabtesco
- Type : 2L80-0001555-XX
- Stable Transfer → Increase Up-time
![](/wp-content/uploads/2022/01/pp6.png)
LLMARM
- Application System : TEL TELIUS
- Description : LLM Arm Assembly
- Stable Transfer → Increase Up-time
配件销售
-
Leak Sensor
-
Silicon carbide precision material processing devices
-
HDIW Supply System
-
Pipeline Sealing Cap