Based on technology and supported by service

With the historical mission of bring bricks and tiles for the ‘China wisely made’. We would abide by the spirit of scientific research and the needs of our country as well as the people.
With the positive attitude of forging ahead and pioneering, we strive to leave a chapter of Z & H in the history of semiconductor equipment in the intelligent manufacturing industry.

The localized equipment for major equipment before and after lithography [gluing and developing].

TEL TRACK

TEL TRACK

Refurbishing & Remanufacture
Technical Service
Installation & Set-up
Calibration or Re-calibration
Parts Replacement
Coat & Dev Modify and Upgrade
Wafer Size Conversion
M/A, CS Arm Overhaul
WEE Lamphouse OH
CP, HP Overhaul
Heater Exchange OH
T&H, Monitor OH

Repair & Maintenance for parts

Repair / Remanufacturing

Main Arm ，C/S Arm ，WEE ，THERMO-CON ，Temp CTL , ACU, DC Power, T&H , Spin Motor & Driver , CP Unity etc.

Repair & Maintenance for parts

8-inch

Robot Overhaul

Application System : TEL Unity2e
Maker : Yaskawa Electric
Controller Model : SRC- Ⅰ or SRC-Ⅱ
Robot Type : VS2A or VS2B/VS2C/VS2E
Pre-Aligner Type : V0SJ, V0SH

Stable Transfer → Increase Up-time

Gap ass’y Overhaul

Application : SCCM, DRM, IEM, PE chamber
Chain change
Bearing Change
Balance Calibration

Transformation and Upgrading

Vacuum Arm

Mechanical arms

Main arm modify to vacuum arm, centering accurate transmit.
ETCInclude Tel Scurrber tool main arm modify.

PDP to LCD

Operation panel

PDP is easilybroken.
Improve clarity, operation more convenient for user.

External Sensor

BUFFER TANK

The internal sensor of chemical buffer tank ageing frequently and scrapping occurs.
The external sensor of buffer tank does not need to contact the chemicals, which avoids corrosion and causes the machine not to be scrapped.
The chemical level (LL, L, H, HH) of buffer tank is easy to adjust and saves time.

Transformation and Upgrading

12-inch

LLM MOTOR

Application System :TEL Telius
Maker : Nabtesco
Type : 2L80-0001555-XX
Stable Transfer → Increase Up-time

LLMARM

Application System : TEL TELIUS
Description : LLM Arm Assembly
Stable Transfer → Increase Up-time

TEL ETCH Technical Services

Refurbishing & Remanufacture
Gap Overhaul
Technical Service and Support
PM Service
Installation & Start-up
Parts Supply & Services
Chamber Addition & Upgrade
Parts Replacement
Calibration or Re-calibration
Magnet Overhaul
Robot Overhaul
Wafer Size Conversion

Lithography Technical Services

二手备件及维修类

序号	名称	规格型号
1	控制基板（买断or维修）	WL2CNT等
2	通讯基板（买断or维修）	NK862等
3	驱动基板	EPDRV2 等
4	干涉计（买断or维修）	5517A/5517B/ 5517C/5517D
5	shutter马达（买断or维修）	UGRMEM-01SNQ12等
6	OF马达	ETC-266206 200/3CH
7	照度计	全系列
8	汞灯电源	全系列
9	LC Relay Amp/ZT Relay Amp（买断or维修）	SF系列

序号	名称	规格型号
1	测试光罩	A版、 B版、CD版、 DIS版、 MF版
2	LC Relay Amp	SF系列
3	光学镜片	照明系列
4	基板	6层板以下系列
5	bellows马达	全系列
6	cassette	6inch/8inch