Single wafer Scrubber clean tool

ZHS-200
8～6inch
4 positive configurations WPH ＞160 pieces
2 positive and 2 negative configurations WPH ＞100 pieces

Application fields:

Silicon based, compound semiconductors, filters, advanced packaging, power devices, Micro LEDs and other fields.

Product advantages:

  1. High quality – CLASS 10 environmental level; Static elimination system
  2. Diversity – different cleaning methods meet the needs of different processes
  3. Customization – configure according to customer needs
  4. Progressiveness – the latest operating system, software function diversity