Coat Developer Equipment

12 & 8 inch

Application fields: Silicon based PI technology, advanced packaging and other fields.

Product advantages:

  1. Connecting to the lithography machine and complete the automated production of the lithography process
  2. Meeting the high-precision process requirements with self-developed high-precision cold and hot plates
  3. Compatible with both products 200mm/300mm
  4. Stacked structural layout with high output per unit area
  5. Able to support SECS communication and AMHS system
  6. Able to configure equipment according to customer requirements
  7. Localization of components, reducing costs significantly

Independent research and development

  • Software Running
  • Mechanical Transmission
  • Circuit Module
  • Unit for Coating
Compound Semiconductor

Process capacity: > 0.18um
Products: Gallium Arsenide (GaAs),
Gallium Nitride (GaN),
Silicon Carbide (SiC), Filter (Filter)

Microcomputer
Semiconductor

Process capacity: > 0.18um
Product: MEMS

Silicon-based Semiconductor

Process capacity: > 90nm
Products: IGBT, CMOS, MPU, MCU,
DSP, RAM, ROM, Flash